AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency

TítolAlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency
Tipus de publicacióConference Proceedings
Year of Conference2019
Conference NameInternational Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
Edició20
Campus d'excel·lència internacional U A B