Nonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation

TitleNonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation
Publication TypeConference Paper
Year of Publication2017
Conference Name19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
Date Published2017
Campus d'excel·lència internacional U A B