Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

TitlePhase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation
Publication TypeJournal Article
Year of Publication2017
JournalIEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS–I: REGULAR PAPERS
Abstract

In this paper, we will present an all-CMOS oscillator
based on monolithically integrated MEMS resonators fabricated
from the VIA layer (tungsten) of a 0.35 μm CMOS technology
process. With this CMOS MEMS closed-loop system, the nonlinear
MEMS frequency response due to the electrostatic actuation
has been reconstructed. Using a phase-controlled closed-loop the
frequency stability of the self-sustained oscillator at different
nonlinear operation points has been analyzed, showing an optimal
point belonging to the unstable region of the MEMS resonator.

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