Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay

TitleFabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay
Publication TypeJournal Article
Year of Publication2018
JournalMicroelectronics Engineering
Volume192
Start Page44
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