AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency

TitleAlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency
Publication TypeConference Proceedings
Year of Conference2019
Conference NameInternational Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
Edition20
Campus d'excel·lència internacional U A B