AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates

TitleAlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates
Publication TypeConference Proceedings
Year of Conference2019
Conference NameInternational Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
Edition20
Campus d'excel·lència internacional U A B