A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

TitleA feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range
Publication TypeConference Proceedings
Year of Conference2019
Conference NameConference on Ph. D Research in Microelectronics and Electronics (PRIME),
Edition15
Campus d'excel·lència internacional U A B