9.5 % SCANDIUM DOPED ALN PMUT COMPATIBLE WITH PREPROCESSED CMOS SUBSTRATES

Title9.5 % SCANDIUM DOPED ALN PMUT COMPATIBLE WITH PREPROCESSED CMOS SUBSTRATES
Publication TypeConference Proceedings
Year of Conference2021
Conference NameIEEE International Conference on Micro Electro Mechanical Systems
Edition32
Campus d'excel·lència internacional U A B