MULTI-FREQUENCY THIN FILM HBAR MICROSENSOR FOR ACOUSTIC IMPEDANCE SENSING OVER THE GHZ RANGE

TitleMULTI-FREQUENCY THIN FILM HBAR MICROSENSOR FOR ACOUSTIC IMPEDANCE SENSING OVER THE GHZ RANGE
Publication TypeConference Proceedings
Year of Conference2021
Conference NameInternational Conference on Solid-State Sensors, Actuators and Microsystems
Edition21
Campus d'excel·lència internacional U A B