2019

AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency. 20th ed. International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII . 2019.
AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates. 20th ed. International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII . 2019.

2018

Multi-frequency silicon nanofractal resonator. 31st IEEE International Conference on Micro Electro Mechanical Systems. 2018.

Pages

Campus d'excel·lència internacional U A B