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2015
Nicu L
,
Auzelyte V
,
Villanueva LG
,
Barniol N
,
Perez-Murano F
,
Venstra WJ
, et al.
.
Nanoelectromechanical Systems (NEMS)
. Resonant MEMS: Fundamentals, Implementation, and Application. John Wiley & Sons; 2015;.
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Marigó E
,
Sansa M
,
Pérez-Murano F
,
Uranga A
,
Barniol N
.
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
. Sensors. Multidisciplinary Digital Publishing Institute; 2015;15:17036–17047.
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Vidal-Álvarez G
,
Agustí J
,
Torres F
,
Abadal G
,
Barniol N
,
Llobet J
, et al.
.
Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (2015 Nanotechnology 26 [https://dx.doi.org/10.1088/0957-4484/26/14/145502] 145502 )
. Nanotechnology [Internet]. 2015;26:259601.
https://stacks.iop.org/0957-4484/26/i=25/a=259601
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Dynamic properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode
. IEEE Sensors Journal. 2015;16.
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Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator monolithically Integrated with CMOS Readout Circuitry
. Micromachines. 2015;7.
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CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
. Micromachines. 2015;7.
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Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction
. Sensors. 2015;15.
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Uranga A
,
Verd J
,
Barniol N
.
CMOS–MEMS resonators: from devices to applications
. Microelectronic Engineering. Elsevier; 2015;132:58–73.
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2014
Vidal-Alvarez G
,
Torres F
,
Barniol N
,
Gottlieb O
.
The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams
. In Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on. IEEE; 2014. pp. 1–6.
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Riverola M
,
Vidal-Alvarez G
,
Torres F
,
Barniol N
.
3-terminal tungsten CMOS-NEM relay
. In Microelectronics and Electronics (PRIME), 2014 10th Conference on Ph. D. Research in. IEEE; 2014. pp. 1–4.
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