Publicaciones
] «9.5 % SCANDIUM DOPED ALN PMUT COMPATIBLE WITH PREPROCESSED CMOS SUBSTRATES», IEEE International Conference on Micro Electro Mechanical Systems. 2021.
«High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation», Sensors, vol. 21, 2021.
«MONOLITHIC PMUT-ON-CMOS ULTRASOUND SYSTEM FOR SINGLE PIXEL ACOUSTIC IMAGING», IEEE International Conference on Micro Electro Mechanical Systems. 2021.
«MULTI-FREQUENCY THIN FILM HBAR MICROSENSOR FOR ACOUSTIC IMPEDANCE SENSING OVER THE GHZ RANGE», International Conference on Solid-State Sensors, Actuators and Microsystems . 2021.
«Improved Electromechanical Transduction for PiezoMUMPS HBAR Impedance Sensors», IEEE International Frequency Control Symposia. 2020.
, «Miniaturized 0.13 μm CMOS Front-End Analog for AlN PMUT Arrays», Sensors, vol. 20, 2020.
, «Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications», IEEE Access, 2020.
, «Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator», Nanomaterials, vol. 10, 2020.
«Resonant Frequencies Of A Nanoscale Fractal Resonator», COMSOL conference . 2020.
, «Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation», IEEE Sensors Journal, vol. 20, 2020.
«AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates», International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII . 2019.
«AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation», IEEE International Workshop on PiezoMEMS (IWPM), . 2019.
«AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency», International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII . 2019.
«A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range», Conference on Ph. D Research in Microelectronics and Electronics (PRIME), . 2019.
«Liquid Operable AlN PMUT with High Output Pressure Capabilities.», IEEE International Ultrasonics Symposium IUS 2019. 2019.
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