Nonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation

TítuloNonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation
Tipo de publicaciónConference Paper
Año de publicación2017
Conference Name19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
Date Published2017
Campus d'excel·lència internacional U A B