Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resoantors with noise-matched high-gain transimpedance CMOS amplifier

TítuloUltra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resoantors with noise-matched high-gain transimpedance CMOS amplifier
Tipo de publicaciónConference Paper
Año de publicación2017
Conference Name19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
Campus d'excel·lència internacional U A B