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Título | AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates |
Tipo de publicación | Conference Proceedings |
Year of Conference | 2019 |
Conference Name | International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII |
Edición | 20 |