AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation

TítuloAlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation
Tipo de publicaciónConference Proceedings
Year of Conference2019
Conference NameIEEE International Workshop on PiezoMEMS (IWPM),
Campus d'excel·lència internacional U A B