A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

TítuloA feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range
Tipo de publicaciónConference Proceedings
Year of Conference2019
Conference NameConference on Ph. D Research in Microelectronics and Electronics (PRIME),
Edición15
Campus d'excel·lència internacional U A B