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Universitat Autònoma de Barcelona
Electronic Circuits and Systems Research Group
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2013
Muñoz-Gamarra JL
,
Alcaine P
,
Marigó E
,
Giner J
,
Uranga A
,
Esteve J
, et al.
.
Integration of NEMS resonators in a 65 nm CMOS technology
. Microelectronic Engineering. 2013;.
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Uranga A
,
Verd J
,
Marigó E
,
Giner J
,
Muñóz-Gamarra JL
,
Barniol N
.
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
. Sensors and Actuators, A: Physical. 2013;197:88–95.
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Marigó E
,
Verd J
,
Lopez JL
,
Uranga A
,
Barniol N
.
Packaged CMOS-MEMS free-free beam oscillator
. J Micromech. Microeng. 2013;23.
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2012
Munoz-Gamarra JL
,
Barniol N
,
Juillard J
.
Analysis of a MEMS-based ring oscillator
. ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems. 2012. pp. 2103–2106.
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Giner J
,
Uranga A
,
Muñóz-Gamarra JL
,
Marigó E
,
Barniol N
.
A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators
. Journal of Micromechanics and Microengineering. 2012;22.
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Giner J
,
Uranga A
,
Muñoz-Gamarra JL
,
Marigó E
,
Barniol N
.
VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator
. Electronics Letters. 2012;48:514–516.
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Ferrer EM
,
Muñoz-Gamarra JL
,
Giner J
,
Uranga A
,
Barniol N
.
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
. Microelectronic Engineering. 2012;98:458–462.
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Giner J
,
Uranga A
,
Marigó E
,
Muñoz-Gamarra JL
,
Colinet E
,
Barniol N
, et al.
.
Cancellation of the parasitic feedthrough current in an integrated CMOS-MEMS clamped-clamped beam resonator
. Microelectronic Engineering. 2012;98:599–602.
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2011
Giner J
,
Uranga A
,
Marigó E
,
Muñoz-Gamarra JL
,
Barniol N
.
UHF CMOS-MEMS bulk acoustic wave resonator
. Proceedings of the IEEE International Frequency Control Symposium and Exposition. 2011.
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Marigó E
,
Muñoz-Gamarra JL
,
Vidal G
,
Giner J
,
Torres F
,
Uranga A
, et al.
.
Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection
. Microelectronic Engineering. 2011;88:2325–2329.
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