2011

2010

Marigó E, Muñoz-Gamarra JL, Giner J, Lopez JL, Torres F, Uranga A, et al.. Linear operation of a 11MHz CMOS-MEMS Resonator. 2010 IEEE International Frequency Control Symposium, FCS 2010. 2010. pp. 158–161.
López JL, Marigó E, Giner J, L.muñoz-Gamarra J, Torres F, Uranga A, et al.. CMOS-MEMS free-free beam resonators. 2010 Proceedings of the European Solid State Device Research Conference, ESSDERC 2010. 2010. pp. 464–467.

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